Title of article :
Surface, interface and valence band structures of ultra-thin silicon
oxides
Author/Authors :
Takeo Hattori، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1998
Abstract :
The studies on surface, interface and valence band structures of ultra-thin silicon oxides at the initial stage of oxidation
are reviewed. It will be shown that the surface and valence band structures of ultra-thin oxides are affected by the interface
structures. q1998 Elsevier Science B.V. All rights reserved
Keywords :
Surface microroughness , Valence band discontinuity , XPS , AFM , Silicon oxide , Interface structure
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
