Title of article
Surface, interface and valence band structures of ultra-thin silicon oxides
Author/Authors
Takeo Hattori، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1998
Pages
9
From page
156
To page
164
Abstract
The studies on surface, interface and valence band structures of ultra-thin silicon oxides at the initial stage of oxidation
are reviewed. It will be shown that the surface and valence band structures of ultra-thin oxides are affected by the interface
structures. q1998 Elsevier Science B.V. All rights reserved
Keywords
Surface microroughness , Valence band discontinuity , XPS , AFM , Silicon oxide , Interface structure
Journal title
Applied Surface Science
Serial Year
1998
Journal title
Applied Surface Science
Record number
992594
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