New development of a high-resolution scanning ESD system for two-dimensional images of hydrogen and its applications

Currently, many people have focused their study of hydrogen behaviors on solid surfaces because this plays an important role in surface physics and chemistry. Hydrogen is detected easily by a time-of-flight type electron-stimulated desorption spectroscopy TOF-ESD.. Very recently, we have developed way to measure a two-dimensional distribution of hydrogen with high-resolution of less than 1 mm using a thermal field emission TFE.electron gun. The high detection efficiency of the TOF-ESD system allows various ESD measurements including two-dimensional analysis. This method is complementary to scanning Auger electron microscopy SAM., since SAM is insensitive to hydrogen but is able to analyze surface concentration for most elements. In this article, we show some results obtained by our TOF-ESD system using a LEED gun and a LaB6 gun and recent progress using a TFE gun. q1998 Elsevier Science B.V. All rights reserved