Study on the ZrO2–Y2O3/Fe interface

XPS measurements of the electron binding energy are made for the elements Zr, Y, Fe, and O at different depths to understand the effect of oxygen ion bombardment on the interface between a ZrO2–Y2O3 film and an Fe substrate. The results show that (FeZr)O1+x (x=1–<2) is formed at the interface as a result of the bombardment and reaction of depositing atoms and ions. The AES profile shows a broad transient region about 40 nm wide. Carbon contamination, a result of residual gases in the chamber during r.f. magnetron sputter deposition, is also discussed.