Structure characterization of vanadium oxide thin films prepared by magnetron sputtering methods

Vanadium oxides thin films prepared by magnetron sputtering methods have been studied with X-ray photoelectron spectroscopy, atomic force microscopy and X-ray diffraction. The phases of vanadium oxide films were related to the V2p3/2 binding energy in the XPS. The AFM images of polycrystalline vanadium dioxide surface were given. The electronic, micro and macro properties of VO2 thin film are coincident with its optical and electrical measurement.