Title of article :
Infrared absorption analysis of organosiliconroxygen plasmas in
a microwave multipolar plasma excited by distributed electron
cyclotron resonance
Author/Authors :
P. Raynaud، نويسنده , , T. Amilis، نويسنده , , Y. Segui، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Abstract :
P. Raynaud ), T. Amilis, Y. Segui
Keywords :
PLASMA , Infrared spectroscopy , Organosilicon , thin-film deposition
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
