Electrical and optical properties of thin indium tin oxide films produced by pulsed laser ablation in oxygen or rare gas atmospheres

Films of indium tin oxide ITO.have been produced in different background gases by pulsed laser deposition PLD.. The films deposited in rare gas atmospheres on room temperature substrates were metallic, electrically conductive, but had poor transmission of visible light. For substrate temperatures at 2008C, the specific resistivity was reduced and the transmission of visible light enhanced for all background gases. Films produced in oxygen turned out to be superior to films deposited in other gases at the same temperature. q1999 Elsevier Science B.V. All rights reserved