The existence of a deformed region in YBa Cu O thin films 2 3 7yd deposited on MgO single crystals

YBa2Cu3O7yd thin films were deposited on MgO single crystals by means of an off-axis radio-frequency magnetron sputtering method. The thickness of the deposited films was proportional to deposition time with high precision. When the thickness was under 50 nm, The critical temperature was drastically declined. It was concluded that a deformed region existed within 50 nm from the interface. q1999 Elsevier Science B.V. All rights reserved