Title of article :
On the reaction mechanism in laser-induced deposition of
tungsten microstructures from WF rH 6 2
Author/Authors :
K. Piglmayer، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Abstract :
Simultaneous and locally divided deposition and etching of W in WF6qH2 atmosphere is investigated by local
laser-induced heating of thin tungsten layers on quartz substrates. Model calculations based on reaction kinetics allow an
explanation of the different peculiarities of the depositionretching process. q2000 Elsevier Science B.V. All rights
reserved
Keywords :
Tungsten microstructures , LCVD , deposition , Etching
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
