Title of article :
Effect of sputtering gas on the surface composition of an Al–Pd–Mn quasicrystal
Author/Authors :
Cynthia J. Jenks، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Pages :
6
From page :
23
To page :
28
Abstract :
We demonstrate the effects of different inert sputtering gases on the surface composition of icosahedral i-. Al–Pd–Mn. The sputtering gases used include He, Ne, Ar, Xe, and Kr. We demonstrate that the steady-state composition is independent of the inert gas chosen. This steady-state composition falls outside of the quasicrystalline region of the Al–Pd–Mn phase diagram. However, the fluence ionsrcm2. to achieve steady-state depends on the inert gas. Helium requires a much higher fluence than the other gases. Because of this, He can be used to clean the surface, if the time fluence.for sputtering is kept to a minimum, without causing the large compositional shift induced with a relatively small fluence by the most common sputtering gas, Ar. q2000 Elsevier Science B.V. All rights reserved
Keywords :
sputtering , Al–Pd–Mn , Surface composition
Journal title :
Applied Surface Science
Serial Year :
2000
Journal title :
Applied Surface Science
Record number :
996028
Link To Document :
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