Structural and chemical investigation of surface and interface of multilayer optical coatings deposited by DIBS

The investigation of the surface and interface of a multilayer coating is a key factor for producing high quality optical device. In this work, we present a non-destructive technique as X-ray reflectivity to study deeply the chemical and structural quality of the multilayer. XPS depth profile analysis and AFM images have been used to evaluate the chemical intermixing and the surface roughness in order to verify the X-ray results. q2000 Elsevier Science B.V. All rights reserved