Title of article
Reaction dynamics of CW Arq laser induced copper direct writing from liquid electrolyte on polyimide substrates
Author/Authors
K. Kord´as، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
7
From page
127
To page
133
Abstract
Conductive copper patterns were deposited on polyimide PI. surfaces using a focused, scanned CW Arq laser beam at
488-nm wavelength. The deposition process was initiated by a photothermal reaction of a tartarate–complex solution of
Cu2q ions in an alkaline and reducing medium. Deposits were characterised by Field Emission Scanning Electron
Microscope FESEM., Energy Dispersive X-ray Spectrometry EDS.and resistance measurements. The mass of the
deposited copper mCu.and also the rate of the deposition dmCurdt.were calculated from the resistance measurements.
The dependence of the copper deposition rate on the scanning speed of the laser beam, number of scans, laser power and the
temperature of the solution were examined. It was found that more chemical reactions were running parallel during the direct
writing process yielding metallic copper and copper II.-oxide on the PI surface. q2000 Elsevier Science B.V. All rights
reserved.
Keywords
Integrated circuits , reaction kinetics , Chemical , Laser Radiation , surface irradiation effects , Polymers , Radiationeffects , deposition , films and coatings , Integrated circuits , Metallization
Journal title
Applied Surface Science
Serial Year
2000
Journal title
Applied Surface Science
Record number
996105
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