• Title of article

    Reaction dynamics of CW Arq laser induced copper direct writing from liquid electrolyte on polyimide substrates

  • Author/Authors

    K. Kord´as، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2000
  • Pages
    7
  • From page
    127
  • To page
    133
  • Abstract
    Conductive copper patterns were deposited on polyimide PI. surfaces using a focused, scanned CW Arq laser beam at 488-nm wavelength. The deposition process was initiated by a photothermal reaction of a tartarate–complex solution of Cu2q ions in an alkaline and reducing medium. Deposits were characterised by Field Emission Scanning Electron Microscope FESEM., Energy Dispersive X-ray Spectrometry EDS.and resistance measurements. The mass of the deposited copper mCu.and also the rate of the deposition dmCurdt.were calculated from the resistance measurements. The dependence of the copper deposition rate on the scanning speed of the laser beam, number of scans, laser power and the temperature of the solution were examined. It was found that more chemical reactions were running parallel during the direct writing process yielding metallic copper and copper II.-oxide on the PI surface. q2000 Elsevier Science B.V. All rights reserved.
  • Keywords
    Integrated circuits , reaction kinetics , Chemical , Laser Radiation , surface irradiation effects , Polymers , Radiationeffects , deposition , films and coatings , Integrated circuits , Metallization
  • Journal title
    Applied Surface Science
  • Serial Year
    2000
  • Journal title
    Applied Surface Science
  • Record number

    996105