Title of article :
Reaction dynamics of CW Arq laser induced copper direct writing from liquid electrolyte on polyimide substrates
Author/Authors :
K. Kord´as، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Pages :
7
From page :
127
To page :
133
Abstract :
Conductive copper patterns were deposited on polyimide PI. surfaces using a focused, scanned CW Arq laser beam at 488-nm wavelength. The deposition process was initiated by a photothermal reaction of a tartarate–complex solution of Cu2q ions in an alkaline and reducing medium. Deposits were characterised by Field Emission Scanning Electron Microscope FESEM., Energy Dispersive X-ray Spectrometry EDS.and resistance measurements. The mass of the deposited copper mCu.and also the rate of the deposition dmCurdt.were calculated from the resistance measurements. The dependence of the copper deposition rate on the scanning speed of the laser beam, number of scans, laser power and the temperature of the solution were examined. It was found that more chemical reactions were running parallel during the direct writing process yielding metallic copper and copper II.-oxide on the PI surface. q2000 Elsevier Science B.V. All rights reserved.
Keywords :
Integrated circuits , reaction kinetics , Chemical , Laser Radiation , surface irradiation effects , Polymers , Radiationeffects , deposition , films and coatings , Integrated circuits , Metallization
Journal title :
Applied Surface Science
Serial Year :
2000
Journal title :
Applied Surface Science
Record number :
996105
Link To Document :
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