Direct writing of conformal mesoscopic electronic devices by MAPLE DW

We demonstrate a novel pulsed UV laser direct writing technique called MAPLE DW for the fabrication of conformal electronic devices. MAPLE DW (matrix assisted pulsed laser evaporation direct write) is a soft laser forward transfer technique that takes place in air and at room temperature. Speci®c experimental results for the deposition of Ag metal and BaTiO3 composite dielectrics with electrical quality comparable to conventional thick ®lm deposition techniques will be given as well as a discussion of the relevant issues for further electronic device improvement. The mechanism of the MAPLE DW process that makes it applicable to a broad class of electronic materials and even biomaterials is also described. Published by Elsevier Science B.V.