Initial oxidation process of Mg ®lms characterized by AES, EELS, and UPS

Initial oxidation process of Mg ®lms was investigated by Auger electron spectroscopy (AES), electron energy loss spectroscopy (EELS) and ultraviolet photoelectron spectroscopy (UPS). A polycrystalline Mg ®lm was exposed to oxygen at room temperature. An inspection of EELS reveals that the initial oxidation process could be classi®ed according to the curve pro®le in the low energy loss region. The oxide formation is initiated after oxygen exposure of 3 L (Langmuir). # 2001 Elsevier Science B.V. All rights reserved