Studies on dc magnetron sputtered cadmium oxide ®lms

Thin ®lms of cadmium oxide (CdO) have been prepared by dc reactive magnetron sputtering on glass substrates held at a ®xed temperature of 623 K and at different oxygen partial pressures in 1 10ÿ4±5 10ÿ3 mbar range. The deposited ®lms were characterized by studying the dependence of oxygen partial pressure on their chemical composition, crystallographic structure, electrical and optical properties. Films with a low electrical resistivity of 8:2 10ÿ4 O cm and high visible transmittance of 85% have been obtained at an oxygen partial pressure of 1 10ÿ3 mbar. # 2001 Elsevier Science B.V. All rights reserved