Preparation of highly (1 0 0)-oriented metallic LaNiO3 ®lms on Si substrates by a modi®ed metalorganic decomposition technique

LaNiO3 thin ®lms were deposited on Si substrates by a modi®ed metalorganic decomposition technique using lanthanum nitrate and nickel acetate as the start sources. The structures of the ®lms were characterized by X-ray diffraction and scanning electron microscope. Highly (1 0 0)-oriented LaNiO3 ®lms with smooth and crack-free surfaces were obtained using rapid thermal annealing method. The resistivity versus temperature curves of the textured LaNiO3 ®lms showed that the ®lms possessed good metallic character. # 2001 Elsevier Science B.V. All rights reserved.