Surface modi®cation of oxide thin ®lm and its gas-sensing properties

The SnO2±Fe2O3 thin ®lm sensors with added platinum are studied. The gas-sensing materials (Fe2O3 and SnO2) have been prepared from pentacarbonyl iron [Fe(CO)5] and tin tetrachloride (SnCl4) by plasma enhanced chemical vapor deposition method. In order to improve gas-sensing properties, the deposited ®lms are dipped into an aqueous solution of H2PtCl6 6H2O and heat-treated to form the Pt modi®ed SnO2±Fe2O3 thin ®lm sensors. The surface composition of the Pt modi®ed thin ®lms has been studied by means of X-ray photoelectron spectrum. The electrical properties of the prepared sensors and the effect of Pt addition on the gas-sensing characteristics have also been investigated. # 2001 Elsevier Science B.V. All rights reserved.