Title of article
Surface modi®cation of oxide thin ®lm and its gas-sensing properties
Author/Authors
Tong Maosong، نويسنده , , Dai Guorui*، نويسنده , , Gao Dingsan، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
5
From page
226
To page
230
Abstract
The SnO2±Fe2O3 thin ®lm sensors with added platinum are studied. The gas-sensing materials (Fe2O3 and SnO2) have been
prepared from pentacarbonyl iron [Fe(CO)5] and tin tetrachloride (SnCl4) by plasma enhanced chemical vapor deposition
method. In order to improve gas-sensing properties, the deposited ®lms are dipped into an aqueous solution of H2PtCl6 6H2O
and heat-treated to form the Pt modi®ed SnO2±Fe2O3 thin ®lm sensors. The surface composition of the Pt modi®ed thin ®lms
has been studied by means of X-ray photoelectron spectrum. The electrical properties of the prepared sensors and the effect of
Pt addition on the gas-sensing characteristics have also been investigated. # 2001 Elsevier Science B.V. All rights reserved.
Keywords
PECVD method , Surface modi®cation , Gas Sensors , Thin ®lms
Journal title
Applied Surface Science
Serial Year
2001
Journal title
Applied Surface Science
Record number
996862
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