Precipitate-free epitaxy of YBa2Cu3O7ÿd by atomic control of step arrays on vicinal SrTiO3 (1 0 0) substrates

We have developed a new method which enables us to atomically control the height and the periodicity of the step distribution on vicinal SrTiO3 (1 0 0) substrates. This method also enables us to obtain precipitate-free epitaxy of oxides. Practically thick YBa2Cu3O7ÿd ®lms grown on such terraced vicinal substrates exhibited a regular epitaxial growth, and smooth and precipitate-free surfaces of practical device sizes. # 2001 Elsevier Science B.V. All rights reserved.