Analysis of nanoscale multilayers by EDXS and EELS in the STEM

After a short description of a model for calculation of element specific linescan intensity profiles measured in an analytical transmission electron microscope on cross-sections of nanoscale multilayers by EDXS and EELS in the STEM mode the essential influences to the results are discussed. Particularly, the signal-to-noise ratio is considered. To confirm the model measured and calculated profiles are compared. Investigations on nanoscale multilayers require a field emission gun and a specimen stage with high stability. Specimen drift can lead to completely confused intensity profiles and has to be avoided or corrected during the measurement.