Title of article
Temperature dependence of acetylene adsorption and reaction on Si(1 1 1)-(7×7)
Author/Authors
Augusto De Renzi، نويسنده , , R Biagi، نويسنده , , U del Pennino، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
6
From page
90
To page
95
Abstract
The adsorption and reaction of acetylene dosed on the Si(1 1 1)-(7×7) surface has been studied by means of X-ray photoemission, Auger, and HREELS spectroscopies for different substrate temperatures. For exposure at temperature of 600 °C, only an extremely thin reacted layer can be obtained, which hinders further molecular reaction at the surface, acting as a barrier layer. The increase in surface diffusion occurring between 600 and 750 °C overrides the barrier layer effect, allowing the growth of a thicker SiC.
Keywords
Acetylene , Surface chemical reaction , HREELS , XPS , Silicon carbide
Journal title
Applied Surface Science
Serial Year
2001
Journal title
Applied Surface Science
Record number
997446
Link To Document