Title of article
Formation of β-FeSi2 by excimer laser irradiation of 57Fe/Si bilayers
Author/Authors
Steffen Wagner، نويسنده , , Ettore Carpene، نويسنده , , Lutz Hecht and Peter Schaaf ، نويسنده , , Martin Weisheit، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
6
From page
156
To page
161
Abstract
Pulsed laser annealing has been applied on 57Fe/Si(1 0 0) layers in order to study the formation of iron silicides after irradiation with a XeCl excimer laser. The 57Fe layers were produced by pulsed laser deposition. The number of pulses and the fluence were varied. FeSi, β-FeSi2 and metastable γ-FeSi2 phases have been observed after irradiation. Subsequent thermal annealing leads to the presence of a pure β-FeSi2 surface layer. Rutherford backscattering spectrometry and conversion electron Mössbauer spectroscopy characterized the irradiated layers.
Keywords
?-FeSi2 , RBS , CEMS , Silicide , Laser synthesis
Journal title
Applied Surface Science
Serial Year
2002
Journal title
Applied Surface Science
Record number
997569
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