Measurement of the reaction energy of binary components in tri-phase thin films using the hollow cathode discharge technique

The Arrhenius equation and associated hypotheses are used to show how the heat of formation influences the relative fractions of binary components in tri-phase ceramic films. With a simple expression the heats of formation under different volume fractions and temperature predicted. This expression can be used to solve the formation condition of each film’s component under non-equilibrium conditions and can also be used to understand growth mechanisms in the films.