Title of article
Characterization of rear- and front-side laser ablation plasmas for thin-film deposition
Author/Authors
L Escobar-Alarc?n، نويسنده , , E Camps، نويسنده , , E Haro-Poniatowski، نويسنده , , M Villagran، نويسنده , , C Sanchez، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
5
From page
192
To page
196
Abstract
Thin-film deposition by rear-side laser ablation has been reported as a new configuration for transparent materials. In order to study the features of this configuration, characterization of the rear-side and front-side plasmas was performed. Experiments were carried out in a low vacuum (50 Torr), using SiO2 targets and a Nd:YAG laser as the energy source. The shock wave associated with rear- and front-side ablation plumes were recorded by shadowgraphy and the corresponding velocities were determined in each case. We found a spherical wave front in both cases. Optical emission spectroscopy (OES) was carried out in order to identify the excited species present in each plasma.
Keywords
Shadowgraphy , Thin film , Laser ablation
Journal title
Applied Surface Science
Serial Year
2002
Journal title
Applied Surface Science
Record number
998188
Link To Document