• Title of article

    Characterization of rear- and front-side laser ablation plasmas for thin-film deposition

  • Author/Authors

    L Escobar-Alarc?n، نويسنده , , E Camps، نويسنده , , E Haro-Poniatowski، نويسنده , , M Villagran، نويسنده , , C Sanchez، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2002
  • Pages
    5
  • From page
    192
  • To page
    196
  • Abstract
    Thin-film deposition by rear-side laser ablation has been reported as a new configuration for transparent materials. In order to study the features of this configuration, characterization of the rear-side and front-side plasmas was performed. Experiments were carried out in a low vacuum (50 Torr), using SiO2 targets and a Nd:YAG laser as the energy source. The shock wave associated with rear- and front-side ablation plumes were recorded by shadowgraphy and the corresponding velocities were determined in each case. We found a spherical wave front in both cases. Optical emission spectroscopy (OES) was carried out in order to identify the excited species present in each plasma.
  • Keywords
    Shadowgraphy , Thin film , Laser ablation
  • Journal title
    Applied Surface Science
  • Serial Year
    2002
  • Journal title
    Applied Surface Science
  • Record number

    998188