Deposition of ZnO film by pulsed laser deposition at room temperature

Crystalline zinc oxide (ZnO) films were successfully deposited on sapphire and quartz glass substrates by pulsed laser deposition (PLD) at room temperature. Transmittance measurements showed that crystalline films have a clear cut off at about 350 nm. After annealing at 1000 °C for 10 min, ultraviolet photoluminescence at about 390 nm was observed under 308 nm excitation.