Preparation of epitaxial Pb(Zr,Ti)O3 thin films using coating photolysis process

Epitaxially grown Pb(Zr,Ti)O3 (PZT) thin films have been successfully prepared by the coating photolysis process using ArF excimer laser at room temperature. Starting materials lead-2-ethylhexanoate, zirconium-2-ethylhexanoate oxide and titanium-2-ethyl-1-hexanolate were mixed and diluted with toluene, spin-coated on the single crystal SrTiO3 (STO)(0 0 1) substrate and dried at 150 °C. When dried films were irradiated by ArF excimer laser at a fluence of 50–80 mJ/cm2 at a repetition rate of 10 Hz for 1 min (600 shots), epitaxially PZT perovskite phase films were obtained. Single crystal LaAlO3 (LAO)(0 0 1) and quartz were also used as the substrate, PZT thin films which were grown on STO showed best crystallinity.