Title of article :
Deposition of Er:YAG (YAP) layers by subpicosecond and nanosecond KrF excimer laser ablation
Author/Authors :
Miroslav Jelinek، نويسنده , , Argyro Klini، نويسنده , , Christos Grivas، نويسنده , , J?n Lan?ok، نويسنده , , V?clav Studni?ka، نويسنده , , Jind?ich Chval، نويسنده , , Anna Mackov?، نويسنده , , Costas Fotakis، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Abstract :
Thin films of Er:YAG and Er:YAP were deposited by subpicosecond (450 fs) and nanosecond (20 ns) KrF laser (λ=248 nm) on YAG, YAP, fused silica, silicon and sapphire substrates. Laser spot size, energy density, substrate temperature and deposition ambient (vacuum and oxygen) were varied. Comparison of growth rate, morphology, composition, crystallinity and adhesion of the films grown by subpicosecond and nanosecond deposition is presented.
Keywords :
Er:YAG , Er:YAP , Pulsed laser deposition , Subpicosecond laser , Thin films
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
