Using SIMS and the NIST standard reference material #2137 to calibrate standards used in the 11B(p,α)8Be nuclear reaction analysis of B in Si

Two different methods of using SIMS have been utilized in confirming the dose of a 11B implanted Si reference material that has been used for many years in determining doses of 11B ion-implanted into silicon using the 11B(p,α)8Be nuclear reaction analysis technique. Both methods are based on the NIST SRM 2137. One method uses a B bulk-doped Si sample to transfer the calibration from the 10B of the NIST SRM to the 11B of the NRA standard. The other method uses two identical implants, one of 10B and one of 11B to accomplish the calibration transfer. The dose of the NRA standard was found to be within 5% of the quoted dose for the standard that had been used for years.