Study of Pd–In interaction during Pd deposition on pyrolytically prepared In2O3

In2O3 belongs to the group of metal oxides used successfully for gas detection, with sensitivity for CO and H2 comparable with that of SnO2 and excellent for O3. The sensing properties of these sensors could be greatly improved by adding small amount of transition metals such as Pd, Pt, Au, etc. In this work, we used X-ray photoelectron spectroscopy (XPS) and ion scattering spectroscopy (ISS) to study the growth of Pd particles on In2O3 substrates prepared by spray pyrolysis method. Surface stoichiometry and its changes during Ar+ ion bombardment used for surface cleaning were checked with XPS and ISS. The Pd growth was studied stepwise in situ using the micro-electron beam evaporation source (MEBES) with controlled evaporation rate. XPS and ISS measurements were carried out with special attention to metal–substrate interaction (MSI), which was observed for Pd–In and resulted in the formation of Pd–In alloy with noble metal-like electronic structure. Further, we studied reduction of these samples after oxidation in air. A lower reduction temperature than with bulk PdO was observed. The results are compared with the experiment of Pd deposition performed on a pure In foil.