High-resolution primary ion beam probe for SIMS

High-brightness negative ion beams, especially O beams, from a compact gaseous plasma source are studied to evaluate the suitability for high-resolution SIMS. Ion-optical calculations are made using the beam parameters from the new source. Results suggest that sub-100 nm spot with O beam current of 10 pA is achievable. Beam focusing, the resulting beam current distributions at the target and the expected instrumental performance are discussed. # 2004 Elsevier B.V. All rights reserved