Structural investigation of CoMnGe combinatorial epitaxial thin films using microfocused synchrotron X-ray

We discuss important experimental considerations and high-throughput synchrotron-based techniques for structural characterization of binary and ternary composition-spread thin films. We apply these techniques to obtain detailed structural phase diagrams of CoMnGe ternary alloy system. # 2003 Elsevier B.V. All rights reserved