Title of article
Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange
Author/Authors
K.-S. Chang، نويسنده , , M.A. Aronova، نويسنده , , I. Takeuchi ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
5
From page
224
To page
228
Abstract
We describe the design and operation of our high-throughput thin-film deposition flange which is used to perform
combinatorial pulsed laser deposition (PLD). The portable flange allows us to ‘‘convert’’ different PLD systems into
combinatorial PLD systems. The use of the flange is illustrated in fabrication of a discrete gas sensor library and an epitaxial
composition spread.
# 2003 Published by Elsevier B.V.
Keywords
pulsed laser deposition , Thin-film , High-throughout
Journal title
Applied Surface Science
Serial Year
2004
Journal title
Applied Surface Science
Record number
999126
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