Charge compensation of composite materials using Os coating in X-ray photoelectron spectroscopy

Differential charging was observed for composite materials that consist of metal and insulator with conduction between specimens and a spectrometer (ground potential) in X-ray photoelectron spectroscopy (XPS). As a result of using an Os coating formed by plasma chemical vapor deposition (PCVD) carried out to 1 nm thickness to achieve electrical contact between metallic and insulated materials, measurements under stable surface potential while restraining differential charging of insulated materials became possible. Thus, the use of the Os overcoat was confirmed to be efficient for XPS as a method of charge compensation for composite materials. # 2004 Elsevier B.V. All rights reserved.