Nanotribology of MoSx coatings investigated by oscillating lateral force microscopy

The nanotribological properties of magnetron sputtered sulfur deficient MoSx (x=1.3) coatings were investigated by oscillating lateral force microscopy (LFM) in ambient air of 50% relative humidity (RH) and 23 °C. The formation of a transfer film on the Si3N4 cantilever tip originated from the MoSx coating is found. The effect of that transfer film on the adhesive and frictional force between the MoSx coating and the cantilever tip, is reported for this nanoscale friction tests. Wear of the MoSx coatings was found on sliding against a Si3N4 cantilever tip. The sliding behavior of MoSx coatings in oscillating nano- and macro-sliding tests performed at different oscillation frequency is discussed.