Title :
Spectroscopic Study of the Interface Chemical and Electronic Properties of High ف- Gate Stacks
Author :
Robert J. Nemanich استاد راهنما , Gerald Lucovsky استاد مشاور , Jon - paul Maria استاد مشاور , Angus I. Kingon استاد مشاور
University :
Raleigh North carolina state university
Major :
PhD )Materials Science and Engineering(
Keyword :
dielectric , gate stack , High-k , Photoemission , high