Title :
Residual Stress Effects on Power Slump and Wafer Breakage in GaAs MESFETs
Author :
Robert W. Hendricks استاد راهنما , Aicha Elshabini-Riad استاد مشاور , Avraham Amith استاد مشاور
University :
Virginia Polytechnic Institute and state University
Major :
PhD )Materials Science and Engineering(
Keyword :
semiconductor device , X-ray diffraction , STRESS , Gallium arsenide , MESFET , wafer breakage
