Title :
Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields
Author :
Ali H. Nayfeh استاد راهنما , Scott L. Hendricks استاد مشاور , Donald J. Leo استاد مشاور , Saad A. Ragab استاد مشاور
University :
Virginia Polytechnic Institute and state University
Major :
PhD )Engineering Science and Mechanics(
Keyword :
Primary and Secondary Excitations , Singular Perturbation , Dynamic Pull-in Finite Element RF Switches Microbeams Microplates MEMS Electrostatic Actuation , Thermoelastic Damping , Squeeze-Film Damping , Resonators
