DocumentCode
12184
Title
LINEARLY TUNABLE RF-MEMS CAPACITORS IMPLEMENTED USING AN INTEGRATED REMOVABLE SELF-MASKING TECHNIQUE
Author
Paul D. Franzon استاد راهنما , Jacqueline Krim استاد مشاور , Gianluca Lazzi استاد مشاور
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
PhD )Electrical Engineering(
Number of pages
0
Publish Date
2003
Keyword
SANDIA , Gear , Rotate , varactor , SUMMIT , Removable Mask , RF , Self Masking , Metallization , Tunable Capacitor , MEMS , RF MEMS
Note
01
Language
انگليسي
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