DocumentCode
12561
Title
Optimization of the Process for Semiconductor Device Fabrication in the MicrON 636 Whittemore Cleanroom Facility
Author
Louis Guido استاد مشاور , Diana Farkas استاد مشاور , Robert Hendricks استاد راهنما
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
Master of Science )Materials Science and Engineering(
Number of pages
0
Publish Date
2002
Keyword
LABVIEW , transistor , Cleanroom , Silicon
Note
01
Language
انگليسي
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