DocumentCode
12604
Title
Real-Time Control of Polysilicon Deposition in Single-Wafer Rapid Thermal Chemical Vapor Deposition Furnaces
Author
Kevin M. Lyons استاد مشاور , F. Yates Sorrell استاد راهنما , Dennis E. استاد مشاور
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
PhD )Mechanical Engineering(
Number of pages
0
Publish Date
1998
Note
01
Language
انگليسي
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