Title :
IMPACT OF LOT DEDICATION ON THE PERFORMANCE OF THE FAB
Author :
Subhash C. Sarin استاد راهنما , Yossi Bukchin استاد مشاور , Denise Laman استاد مشاور
University :
Virginia Polytechnic Institute and state University
Major :
Master of Science )Industrial and Systems Engineering(
Keyword :
Dispatching rules , Wafer Fab , semiconductor manufacturing , Photolithography , Lot dedication , Cycle time
