Title :
Development of a Micro Power Relay with Static Electrical Actuator
Author :
Su-Seng Pang استاد مشاور , Elizabeth J. Podlaha-Murphy استاد مشاور , Wanjun Wang استاد راهنما
University :
Lovisiana State University
Major :
Master of Science in Engineering Science )M.S.E.S.( )Mechianical Engineering(
Keyword :
ANSYS , microrelay , UV-LIGA , MEMS , Electroplating , SU-8