Title :
Process-Induced Degradation during the Integration of Pb)Zr/x Ti/1-x(O3 Ferroelectric Capacitors
Author :
Seshu B. Desu استاد راهنما , William T. Reynolds Jr استاد مشاور , In Kyeong Yoo استاد مشاور
University :
Virginia Polytechnic Institute and state University
Major :
PhD )Materials Science and Engineering(
Keyword :
PZT , Thin film , FRAM
