Title :
Integrated Circuit Metrology by Multilevel Patterning Technology
Author :
Ashok Srivastava استاد مشاور , Martin Feldman استاد راهنما , Pratul K. Ajmera استاد مشاور
University :
Lovisiana State University
Major :
Doctor of Philosophy )Ph.D.( )Electrical Computer Engineering(
Keyword :
Metrology , overlay , coordinate tool , encoder , image placement , Integrated Circuit
