• DocumentCode
    17960
  • Title

    Nano-structured PECVD Silicon Films and Their Device Applications

  • Author

    Russell Messier استاد مشاور , Stephen J. Fonash استاد راهنما , Jian Xu استاد مشاور

  • University
    Pennsylvania State University
  • Grade
    نامعلوم
  • Major
    PhD )Engineering Science and Mechanics(
  • Number of pages
    0
  • Publish Date
    2004
  • Keyword

    poly-crystalline silicon , Thin film transistor , Humidity sensor , nano-crystalline silicon

  • Note
    01
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=17&DC=17960