Title :
Preliminary Feasibility Study of Silicon on Insulator )SOI( Microphones
Author :
Sung Kwon Cho استاد مشاور , William W. Clark استاد مشاور , Jeffrey Vipperman استاد راهنما
University :
university of pittsburgh
Major :
Master of Science in Mechanical Engineering )Mechanical Engineering(
Keyword :
Silicon , microphone membranes , SOI , MEMS
