DocumentCode
19033
Title
Electrodeposition of NiW Alloys into Deep Recesses
Author
Robin McCarley استاد مشاور , Elizabeth J. Podlaha-Murphy استاد راهنما , Kevin W. Kelly استاد مشاور
University
Lovisiana State University
Grade
نامعلوم
Major
Master of Science in Chemical Engineering )M.S.Ch.E.( )Chemical Engineering(
Number of pages
0
Publish Date
2001
Keyword
high aspect ratio plating , alloys for MEMS , MEMS materials
Note
01
Language
انگليسي
Link To Document