Title :
Electrodeposition of NiW Alloys into Deep Recesses
Author :
Robin McCarley استاد مشاور , Elizabeth J. Podlaha-Murphy استاد راهنما , Kevin W. Kelly استاد مشاور
University :
Lovisiana State University
Major :
Master of Science in Chemical Engineering )M.S.Ch.E.( )Chemical Engineering(
Keyword :
high aspect ratio plating , alloys for MEMS , MEMS materials