DocumentCode
19137
Title
Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator
University
Brigham Young University Browse
Grade
نامعلوم
Major
PhD )Mechanical Engineering(
Number of pages
0
Publish Date
2005
Keyword
thermal actuator , MODELING , Microelectromechanical systems , MEMS
Note
01
Language
انگليسي
Link To Document