DocumentCode :
19183
Title :
Analysis and Fabrication of MEMS Tunable Piezoelectric Resonators
Author :
William W. Clark استاد راهنما , Roy D. Marangoni استاد مشاور , Jeffery S. Vipperman استاد مشاور
University :
university of pittsburgh
Grade :
نامعلوم
Major :
Master of Science in Mechanical Engineering )Mechanical Engineering(
Number of pages :
0
Publish Date :
2006
Keyword :
film bulk acoustic wave , Lead zirconate titanate , sol gel , PZT , Frequency , surface acoustic wave , bending beam , tuning , MEMS , Piezoelectric , Resonators
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=19183
