DocumentCode
22962
Title
Real-time implementation of an adaptive control system for a 3-zone rapid thermal processing station
Author
Chang Timothy Nam استاد مشاور , Friedland Bernard استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
نامعلوم
Major
Master of Science )Electrical Engineering(
Number of pages
0
Publish Date
1996
Keyword
Semiconductors--Heat treatment , Adaptive control systems , Semiconductor wafers
Note
01
Language
انگليسي
Link To Document