DocumentCode :
23287
Title :
Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
Author :
Thomas R. Kurfess استاد راهنما
University :
Georgia University Of Technology
Grade :
نامعلوم
Major :
Master of Science )Mechanical Engineering(
Number of pages :
0
Publish Date :
2003
Keyword :
Metrology , Microsocopy , Lithography , Heart Imaging , Cardiovascular system Imaging , Optical data processing
Note :
01
Language :
انگليسي
Link To Document :
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