Title :
Preparation and properties of tantalum silicide films on silicon substrates
Author :
Grow James M. استاد مشاور , Ravindra N. M. استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Materials Science and Engineering(
Keyword :
Tantalum silicide )TaSi2( thin films , silicon substrate VARIAN 3125 magnetron DC sputtering system
